N. W. Cheung

2002
1	EE	B. L. Yang, N. W. Cheung, S. Denholm, J. Shao, H. Wong, P. T. Lai, Y. C. Cheng: Ultra-shallow n+p junction formed by PH3 and AsH3 plasma immersion ion implantation. Microelectronics Reliability 42(12): 1985-1989 (2002)

Coauthor Index

1	Y. C. Cheng	[1]
2	S. Denholm	[1]
3	P. T. Lai	[1]
4	J. Shao	[1]
5	H. Wong	[1]
6	B. L. Yang	[1]