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2003 | ||
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2 | EE | Jan Ackaert, Klara Bessemans, Eddy De Backer: Charging induced damage by photoconduction through thick inter metal dielectrics. Microelectronics Reliability 43(9-11): 1525-1529 (2003) |
2001 | ||
1 | Jan Ackaert, Z. Wang, Eddy De Backer, P. Colson, Peter Coppens: Non Contact Surface Potential Measurements for Charging Reduction During Manufacturing of Metal-Insulator-Metal Capacitors. Microelectronics Reliability 41(9-10): 1403-1407 (2001) |
1 | Eddy De Backer | [1] [2] |
2 | Klara Bessemans | [2] |
3 | P. Colson | [1] |
4 | Peter Coppens | [1] |
5 | Z. Wang | [1] |