| |
| 2001 | ||
|---|---|---|
| 1 | Jan Ackaert, Z. Wang, Eddy De Backer, P. Colson, Peter Coppens: Non Contact Surface Potential Measurements for Charging Reduction During Manufacturing of Metal-Insulator-Metal Capacitors. Microelectronics Reliability 41(9-10): 1403-1407 (2001) | |
| 1 | Jan Ackaert | [1] |
| 2 | Eddy De Backer | [1] |
| 3 | Peter Coppens | [1] |
| 4 | Z. Wang | [1] |