2001 | ||
---|---|---|
2 | EE | William D. Hinsberg, Frances A. Houle, Martha I. Sanchez, Gregory M. Wallraff: Chemical and physical aspects of the post-exposure baking process used for positive-tone chemically amplified resists. IBM Journal of Research and Development 45(5): 667-682 (2001) |
1997 | ||
1 | EE | Robert D. Allen, Gregory M. Wallraff, Donald C. Hofer, Roderick R. Kunz: Photoresists for 193-nm lithography. IBM Journal of Research and Development 41(1&2): 95-104 (1997) |
1 | Robert D. Allen | [1] |
2 | William D. Hinsberg | [2] |
3 | Donald C. Hofer | [1] |
4 | Frances A. Houle | [2] |
5 | Roderick R. Kunz | [1] |
6 | Martha I. Sanchez | [2] |