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Hermann Mader

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1988
1EEJoachim Pelka, K. P. Muller, Hermann Mader: Simulation of dry etch processes by COMPOSITE. IEEE Trans. on CAD of Integrated Circuits and Systems 7(2): 154-159 (1988)

Coauthor Index

1K. P. Muller [1]
2Joachim Pelka [1]

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