A. M. Myasnikov

2001
1	EE	M. C. Poon, Y. Gao, T. C. W. Kok, A. M. Myasnikov, Hei Wong: SIMS study of silicon oxynitride prepared by oxidation of silicon-rich silicon nitride layer. Microelectronics Reliability 41(12): 2071-2074 (2001)

Coauthor Index

1	Y. Gao	[1]
2	T. C. W. Kok	[1]
3	M. C. Poon	[1]
4	Hei Wong	[1]