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| 2001 | ||
|---|---|---|
| 1 | EE | M. C. Poon, Y. Gao, T. C. W. Kok, A. M. Myasnikov, Hei Wong: SIMS study of silicon oxynitride prepared by oxidation of silicon-rich silicon nitride layer. Microelectronics Reliability 41(12): 2071-2074 (2001) |
| 1 | Y. Gao | [1] |
| 2 | A. M. Myasnikov | [1] |
| 3 | M. C. Poon | [1] |
| 4 | Hei Wong | [1] |