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2001 | ||
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1 | EE | M. C. Poon, Y. Gao, T. C. W. Kok, A. M. Myasnikov, Hei Wong: SIMS study of silicon oxynitride prepared by oxidation of silicon-rich silicon nitride layer. Microelectronics Reliability 41(12): 2071-2074 (2001) |
1 | Y. Gao | [1] |
2 | A. M. Myasnikov | [1] |
3 | M. C. Poon | [1] |
4 | Hei Wong | [1] |