| |
| 2005 | ||
|---|---|---|
| 1 | EE | S. Dueñas, H. Castán, H. García, J. Barbolla, E. San Andrés, I. Mártil, G. González-Díaz: On the influence of substrate cleaning method and rapid thermal annealing conditions on the electrical characteristics of Al/SiNx/SiO2/Si fabricated by ECR-CVD. Microelectronics Reliability 45(5-6): 978-981 (2005) |
| 1 | E. San Andrés | [1] |
| 2 | J. Barbolla | [1] |
| 3 | H. Castán | [1] |
| 4 | S. Dueñas | [1] |
| 5 | H. García | [1] |
| 6 | G. González-Díaz | [1] |