E. San Andrés

2005
1	EE	S. Dueñas, H. Castán, H. García, J. Barbolla, E. San Andrés, I. Mártil, G. González-Díaz: On the influence of substrate cleaning method and rapid thermal annealing conditions on the electrical characteristics of Al/SiNx/SiO2/Si fabricated by ECR-CVD. Microelectronics Reliability 45(5-6): 978-981 (2005)

Coauthor Index

1	J. Barbolla	[1]
2	H. Castán	[1]
3	S. Dueñas	[1]
4	H. García	[1]
5	G. González-Díaz	[1]
6	I. Mártil	[1]