| |
| 2002 | ||
|---|---|---|
| 1 | EE | Chul-Hong Park, Soo-Han Choi, Sang-Uhk Rhie, Dong-Hyun Kim, Jun-Seong Park, Tae-Hwang Jang, Ji-Soong Park, Yoo-Hyon Kim, Moon-Hyun Yoo, Jeong-Taek Kong: A Hybrid PPC Method Based on the Empirical Etch Model for the 0.14µm DRAM Generation and Beyond. ISQED 2002: 143-147 |
| 1 | Soo-Han Choi | [1] |
| 2 | Dong-Hyun Kim | [1] |
| 3 | Yoo-Hyon Kim | [1] |
| 4 | Jeong-Taek Kong | [1] |
| 5 | Chul-Hong Park | [1] |
| 6 | Ji-Soong Park | [1] |
| 7 | Jun-Seong Park | [1] |
| 8 | Sang-Uhk Rhie | [1] |
| 9 | Moon-Hyun Yoo | [1] |