| |
| 1987 | ||
|---|---|---|
| 1 | EE | Teruo Matsuzawa, A. Moniwa, N. Hasegawa, H. Sunami: Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate. IEEE Trans. on CAD of Integrated Circuits and Systems 6(3): 446-451 (1987) |
| 1 | Teruo Matsuzawa | [1] |
| 2 | A. Moniwa | [1] |
| 3 | H. Sunami | [1] |