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1987 | ||
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1 | EE | Teruo Matsuzawa, A. Moniwa, N. Hasegawa, H. Sunami: Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate. IEEE Trans. on CAD of Integrated Circuits and Systems 6(3): 446-451 (1987) |
1 | Teruo Matsuzawa | [1] |
2 | A. Moniwa | [1] |
3 | H. Sunami | [1] |