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2001 | ||
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1 | EE | A. Stadler, I. Genchev, A. Bergmaier, G. Dollinger, V. Petrova-Koch, Walter Hansch, H. Baumgärtner, I. Eisele: Nitrogen implantations for rapid thermal oxinitride layers. Microelectronics Reliability 41(7): 977-980 (2001) |
1 | H. Baumgärtner | [1] |
2 | A. Bergmaier | [1] |
3 | I. Eisele | [1] |
4 | I. Genchev | [1] |
5 | Walter Hansch | [1] |
6 | V. Petrova-Koch | [1] |
7 | A. Stadler | [1] |