| |
| 2001 | ||
|---|---|---|
| 1 | EE | A. Stadler, I. Genchev, A. Bergmaier, G. Dollinger, V. Petrova-Koch, Walter Hansch, H. Baumgärtner, I. Eisele: Nitrogen implantations for rapid thermal oxinitride layers. Microelectronics Reliability 41(7): 977-980 (2001) |
| 1 | H. Baumgärtner | [1] |
| 2 | G. Dollinger | [1] |
| 3 | I. Eisele | [1] |
| 4 | I. Genchev | [1] |
| 5 | Walter Hansch | [1] |
| 6 | V. Petrova-Koch | [1] |
| 7 | A. Stadler | [1] |