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Rajinder S. Dhaliwal

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2001
1EERajinder S. Dhaliwal, William A. Enichen, Steven D. Golladay, Michael S. Gordon, Rodney A. Kendall, Jon E. Lieberman, Hans C. Pfeiffer, David J. Pinckney, Christopher F. Robinson, James D. Rockrohr, Werner Stickel, Eileen V. Tressler: PREVAIL-Electron projection technology approach for next-generation lithography. IBM Journal of Research and Development 45(5): 615-638 (2001)

Coauthor Index

1William A. Enichen [1]
2Steven D. Golladay [1]
3Michael S. Gordon [1]
4Rodney A. Kendall [1]
5Jon E. Lieberman [1]
6Hans C. Pfeiffer [1]
7David J. Pinckney [1]
8Christopher F. Robinson [1]
9James D. Rockrohr [1]
10Werner Stickel [1]
11Eileen V. Tressler [1]

Copyright © Sun May 17 03:24:02 2009 by Michael Ley (ley@uni-trier.de)