1991 | ||
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2 | Eric Bruls, F. Camerik, H. J. Kretschman, Jochen A. G. Jess: A Generic Method to Develop a Defect Monitoring System for IC Processes. ITC 1991: 218-227 | |
1989 | ||
1 | F. Camerik, P. A. J. Dirks, Jochen A. G. Jess: Qualification and Quantification of Process-Induced Product-Related Defects. ITC 1989: 643-652 |
1 | Eric Bruls (E. M. J. G. Bruls) | [2] |
2 | P. A. J. Dirks | [1] |
3 | Jochen A. G. Jess | [1] [2] |
4 | H. J. Kretschman | [2] |