2006 | ||
---|---|---|
2 | EE | Cuiping Jia, Wei Dong, Caixia Liu, Xindong Zhang, Jingran Zhou, Zhicheng Zhong, Hailin Xue, Huidong Zang, Baokun Xu, Weiyou Chen: Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon. Microelectronics Journal 37(11): 1297-1301 (2006) |
2004 | ||
1 | EE | Wei Dong, Xindong Zhang, Caixia Liu, Ming Li, Baokun Xu, Weiyou Chen: Mechanism for convex corner undercutting of (110) silicon in KOH. Microelectronics Journal 35(5): 417-419 (2004) |
1 | Weiyou Chen | [1] [2] |
2 | Wei Dong | [1] [2] |
3 | Cuiping Jia | [2] |
4 | Ming Li | [1] |
5 | Caixia Liu | [1] [2] |
6 | Baokun Xu | [1] [2] |
7 | Hailin Xue | [2] |
8 | Huidong Zang | [2] |
9 | Zhicheng Zhong | [2] |
10 | Jingran Zhou | [2] |