2006 | ||
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1 | EE | Cuiping Jia, Wei Dong, Caixia Liu, Xindong Zhang, Jingran Zhou, Zhicheng Zhong, Hailin Xue, Huidong Zang, Baokun Xu, Weiyou Chen: Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon. Microelectronics Journal 37(11): 1297-1301 (2006) |
1 | Weiyou Chen | [1] |
2 | Wei Dong | [1] |
3 | Cuiping Jia | [1] |
4 | Caixia Liu | [1] |
5 | Baokun Xu | [1] |
6 | Hailin Xue | [1] |
7 | Huidong Zang | [1] |
8 | Xindong Zhang | [1] |
9 | Zhicheng Zhong | [1] |