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| 2006 | ||
|---|---|---|
| 1 | EE | Z. W. He, X. Q. Liu, D. Y. Xu, Y. Y. Wang: Effect of annealing on the properties of low-k nanoporous SiO2 films prepared by sol-gel method with catalyst HF. Microelectronics Reliability 46(12): 2062-2066 (2006) |
| 1 | Z. W. He | [1] |
| 2 | X. Q. Liu | [1] |
| 3 | Y. Y. Wang | [1] |