Z. W. He

2006
1	EE	Z. W. He, X. Q. Liu, D. Y. Xu, Y. Y. Wang: Effect of annealing on the properties of low-k nanoporous SiO2 films prepared by sol-gel method with catalyst HF. Microelectronics Reliability 46(12): 2062-2066 (2006)

Coauthor Index

1	X. Q. Liu	[1]
2	Y. Y. Wang	[1]
3	D. Y. Xu	[1]