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Z. W. He

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2006
1EEZ. W. He, X. Q. Liu, D. Y. Xu, Y. Y. Wang: Effect of annealing on the properties of low-k nanoporous SiO2 films prepared by sol-gel method with catalyst HF. Microelectronics Reliability 46(12): 2062-2066 (2006)

Coauthor Index

1X. Q. Liu [1]
2Y. Y. Wang [1]
3D. Y. Xu [1]

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