1999 | ||
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1 | EE | David E. Kotecki, John D. Baniecki, Hua Shen, Robert B. Laibowitz, Katherine L. Saenger, Jingyu Jenny Lian, Thomas M. Shaw, Satish D. Athavale, Cyril Cabral Jr., Peter R. Duncombe, Martin Gutsche, Gerhard Kunkel, Young-Jin Park, Yun-Yu Wang, Richard Wise: (Ba, Sr)TiO3 dielectrics for future stacked- capacitor DRAM. IBM Journal of Research and Development 43(3): 367-382 (1999) |
1 | Satish D. Athavale | [1] |
2 | John D. Baniecki | [1] |
3 | Cyril Cabral Jr. | [1] |
4 | Peter R. Duncombe | [1] |
5 | Martin Gutsche | [1] |
6 | David E. Kotecki | [1] |
7 | Gerhard Kunkel | [1] |
8 | Robert B. Laibowitz | [1] |
9 | Jingyu Jenny Lian | [1] |
10 | Young-Jin Park | [1] |
11 | Katherine L. Saenger | [1] |
12 | Thomas M. Shaw | [1] |
13 | Hua Shen | [1] |
14 | Richard Wise | [1] |