| |
| 1991 | ||
|---|---|---|
| 1 | EE | Roberto Guerrieri, Karim H. Tadros, John K. Gamelin, Andrew R. Neureuther: Massively parallel algorithms for scattering in optical lithography. IEEE Trans. on CAD of Integrated Circuits and Systems 10(9): 1091-1100 (1991) |
| 1 | John K. Gamelin | [1] |
| 2 | Roberto Guerrieri | [1] |
| 3 | Andrew R. Neureuther | [1] |