1991 | ||
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1 | EE | Roberto Guerrieri, Karim H. Tadros, John K. Gamelin, Andrew R. Neureuther: Massively parallel algorithms for scattering in optical lithography. IEEE Trans. on CAD of Integrated Circuits and Systems 10(9): 1091-1100 (1991) |
1 | Roberto Guerrieri | [1] |
2 | Andrew R. Neureuther | [1] |
3 | Karim H. Tadros | [1] |