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Michael Switkes

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2001
1EEA. Keith Bates, Mordechai Rothschild, Theodore M. Bloomstein, Theodore H. Fedynyshyn, Roderick R. Kunz, Vladimir Liberman, Michael Switkes: Review of technology for 157-nm lithography. IBM Journal of Research and Development 45(5): 605-614 (2001)

Coauthor Index

1A. Keith Bates [1]
2Theodore M. Bloomstein [1]
3Theodore H. Fedynyshyn [1]
4Roderick R. Kunz [1]
5Vladimir Liberman [1]
6Mordechai Rothschild [1]

Copyright © Sun May 17 03:24:02 2009 by Michael Ley (ley@uni-trier.de)