2007 | ||
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1 | EE | Y. C. Zhang, Y. F. Wu, S. G. Ma, S. N. Sun, Y. Zhou, M. Geng: Preparation and performance study of TiN films deposited by MF unbalanced magnetron sputtering technique. IJCAT 29(2/3/4): 173-177 (2007) |
1 | M. Geng | [1] |
2 | S. G. Ma | [1] |
3 | Y. F. Wu | [1] |
4 | Y. C. Zhang | [1] |
5 | Y. Zhou | [1] |