| |
| 2007 | ||
|---|---|---|
| 1 | EE | Y. C. Zhang, Y. F. Wu, S. G. Ma, S. N. Sun, Y. Zhou, M. Geng: Preparation and performance study of TiN films deposited by MF unbalanced magnetron sputtering technique. IJCAT 29(2/3/4): 173-177 (2007) |
| 1 | M. Geng | [1] |
| 2 | S. N. Sun | [1] |
| 3 | Y. F. Wu | [1] |
| 4 | Y. C. Zhang | [1] |
| 5 | Y. Zhou | [1] |