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M. Geng

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2007
1EEY. C. Zhang, Y. F. Wu, S. G. Ma, S. N. Sun, Y. Zhou, M. Geng: Preparation and performance study of TiN films deposited by MF unbalanced magnetron sputtering technique. IJCAT 29(2/3/4): 173-177 (2007)

Coauthor Index

1S. G. Ma [1]
2S. N. Sun [1]
3Y. F. Wu [1]
4Y. C. Zhang [1]
5Y. Zhou [1]

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