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2003 | ||
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1 | EE | David C. T. Or, P. T. Lai, J. K. O. Sin, Paul C. K. Kwok, J. P. Xu: Enhanced reliability for low-temperature gate dielectric of MOS devices by N2O or NO plasma nitridation. Microelectronics Reliability 43(1): 163-166 (2003) |
1 | Paul C. K. Kwok | [1] |
2 | P. T. Lai | [1] |
3 | David C. T. Or | [1] |
4 | J. P. Xu | [1] |