| 2007 |
|---|
| 3 | EE | A. Phommahaxay,
G. Lissorgues,
L. Rousseau,
T. Bourouina,
P. Nicole:
Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching
CoRR abs/0711.3276: (2007) |
| 2 | EE | O. Français,
M.-C. Jullien,
L. Rousseau,
Patrick Poulichet,
S. Desportes,
A. Chouai,
J.-P. Lefevre,
J. Delaire:
An Active Chaotic Micromixer Integrating Thermal Actuation Associating PDMS and Silicon Microtechnology
CoRR abs/0711.3290: (2007) |
| 2005 |
|---|
| 1 | EE | F. Marty,
L. Rousseau,
B. Saadany,
B. Mercier,
O. Français,
Y. Mita,
T. Bourouina:
Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures.
Microelectronics Journal 36(7): 673-677 (2005) |
