| |
| 2007 | ||
|---|---|---|
| 2 | EE | A. Giridhar, F. Verjus, F. Marty, A. Bosseboeuf, T. Bourouina: Electrostatically-Driven Resonator on Soi with Improved Temperature Stability CoRR abs/0711.3288: (2007) |
| 2005 | ||
| 1 | EE | F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, T. Bourouina: Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures. Microelectronics Journal 36(7): 673-677 (2005) |
| 1 | A. Bosseboeuf | [2] |
| 2 | T. Bourouina | [1] [2] |
| 3 | O. Français | [1] |
| 4 | A. Giridhar | [2] |
| 5 | B. Mercier | [1] |
| 6 | Y. Mita | [1] |
| 7 | L. Rousseau | [1] |
| 8 | B. Saadany | [1] |
| 9 | F. Verjus | [2] |