2007 | ||
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1 | EE | A. Phommahaxay, G. Lissorgues, L. Rousseau, T. Bourouina, P. Nicole: Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching CoRR abs/0711.3276: (2007) |
1 | T. Bourouina | [1] |
2 | G. Lissorgues | [1] |
3 | A. Phommahaxay | [1] |
4 | L. Rousseau | [1] |