2002 | ||
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1 | EE | Jie-Hua Zhao, Wen-Jie Qi, Paul S. Ho: Thermomechanical property of diffusion barrier layer and its effect on the stress characteristics of copper submicron interconnect structures. Microelectronics Reliability 42(1): 27-34 (2002) |
1 | Paul S. Ho | [1] |
2 | Jie-Hua Zhao | [1] |