2005 | ||
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1 | EE | Karina Grundke, Astrid Drechsler, Nicole Petong, Cornelia Bellmann, Manfred Stamm, O. Wunnicke, J. Reichelt, I. Mäge, B. Pinter, T. Pearce, M. Voigt: On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern Collapse in High Aspect Ratio Patterning of Photoresists. ICMENS 2005: 14-15 |
1 | Cornelia Bellmann | [1] |
2 | Astrid Drechsler | [1] |
3 | Karina Grundke | [1] |
4 | I. Mäge | [1] |
5 | T. Pearce | [1] |
6 | Nicole Petong | [1] |
7 | J. Reichelt | [1] |
8 | Manfred Stamm | [1] |
9 | M. Voigt | [1] |
10 | O. Wunnicke | [1] |