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| 2005 | ||
|---|---|---|
| 1 | EE | Karina Grundke, Astrid Drechsler, Nicole Petong, Cornelia Bellmann, Manfred Stamm, O. Wunnicke, J. Reichelt, I. Mäge, B. Pinter, T. Pearce, M. Voigt: On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern Collapse in High Aspect Ratio Patterning of Photoresists. ICMENS 2005: 14-15 |
| 1 | Cornelia Bellmann | [1] |
| 2 | Karina Grundke | [1] |
| 3 | I. Mäge | [1] |
| 4 | T. Pearce | [1] |
| 5 | Nicole Petong | [1] |
| 6 | B. Pinter | [1] |
| 7 | J. Reichelt | [1] |
| 8 | Manfred Stamm | [1] |
| 9 | M. Voigt | [1] |
| 10 | O. Wunnicke | [1] |