I. Mäge

2005
1	EE	Karina Grundke, Astrid Drechsler, Nicole Petong, Cornelia Bellmann, Manfred Stamm, O. Wunnicke, J. Reichelt, I. Mäge, B. Pinter, T. Pearce, M. Voigt: On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern Collapse in High Aspect Ratio Patterning of Photoresists. ICMENS 2005: 14-15

Coauthor Index

1	Cornelia Bellmann	[1]
2	Astrid Drechsler	[1]
3	Karina Grundke	[1]
4	T. Pearce	[1]
5	Nicole Petong	[1]
6	B. Pinter	[1]
7	J. Reichelt	[1]
8	Manfred Stamm	[1]
9	M. Voigt	[1]
10	O. Wunnicke	[1]