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Noboru Nomura

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1993
2EEKenji Harafuji, Akio Misaka, Noboru Nomura, Masahiro Kawamoto, Hirohiko Yamashita: A novel hierarchical approach for proximity effect correction in electron beam lithography. IEEE Trans. on CAD of Integrated Circuits and Systems 12(10): 1508-1514 (1993)
1991
1EEYoshihiko Hirai, Sadafumi Tomida, Kazushi Ikeda, Masaru Sasago, Masayuki Endo, Sigeru Hayama, Noboru Nomura: Three-dimensional resist process simulator PEACE (photo and electron beam lithography analyzing computer engineering system). IEEE Trans. on CAD of Integrated Circuits and Systems 10(6): 802-807 (1991)

Coauthor Index

1Masayuki Endo [1]
2Kenji Harafuji [2]
3Sigeru Hayama [1]
4Yoshihiko Hirai [1]
5Kazushi Ikeda [1]
6Masahiro Kawamoto [2]
7Akio Misaka [2]
8Masaru Sasago [1]
9Sadafumi Tomida [1]
10Hirohiko Yamashita [2]

Colors in the list of coauthors

Copyright © Sun May 17 03:24:02 2009 by Michael Ley (ley@uni-trier.de)