Qinglang Luo
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2005
1
EE
Qinglang Luo,
Xianlong Hong
,
Qiang Zhou
,
Yici Cai
: A new algorithm for layout of dark field alternating phase shifting masks.
ACM Great Lakes Symposium on VLSI 2005
: 221-224
Coauthor
Index
1
Yici Cai
[
1
]
2
Xianlong Hong
[
1
]
3
Qiang Zhou
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
