| |
| 2001 | ||
|---|---|---|
| 1 | EE | G. Borsoni, N. Béchu, M. Gros-Jean, M. L. Korwin-Pawlowski, R. Laffitte, V. Le Roux, L. Vallier, N. Rochat, C. Wyon: Ultra-thin oxides on silicon fabricated using ultra-slow multicharged ion beams. Microelectronics Reliability 41(7): 1063-1066 (2001) |
| 1 | N. Béchu | [1] |
| 2 | G. Borsoni | [1] |
| 3 | M. Gros-Jean | [1] |
| 4 | M. L. Korwin-Pawlowski | [1] |
| 5 | N. Rochat | [1] |
| 6 | V. Le Roux | [1] |
| 7 | L. Vallier | [1] |
| 8 | C. Wyon | [1] |