| |
| 1999 | ||
|---|---|---|
| 1 | EE | Evgeni P. Gusev, Hsu-Chang Lu, Eric L. Garfunkel, Torgny Gustafsson, Martin L. Green: Growth and characterization of ultrathin nitrided silicon oxide films. IBM Journal of Research and Development 43(3): 265-286 (1999) |
| 1 | Eric L. Garfunkel | [1] |
| 2 | Evgeni P. Gusev | [1] |
| 3 | Torgny Gustafsson | [1] |
| 4 | Hsu-Chang Lu | [1] |