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Eric L. Garfunkel

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1999
1EEEvgeni P. Gusev, Hsu-Chang Lu, Eric L. Garfunkel, Torgny Gustafsson, Martin L. Green: Growth and characterization of ultrathin nitrided silicon oxide films. IBM Journal of Research and Development 43(3): 265-286 (1999)

Coauthor Index

1Martin L. Green [1]
2Evgeni P. Gusev [1]
3Torgny Gustafsson [1]
4Hsu-Chang Lu [1]

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