![]() | ![]() |
1989 | ||
---|---|---|
2 | EE | Hiroyuki Umimoto, Shinji Odanaka, Ichiro Nakao, Hideya Esaki: Numerical modeling of nonplanar oxidation coupled with stress effects. IEEE Trans. on CAD of Integrated Circuits and Systems 8(6): 599-607 (1989) |
1988 | ||
1 | EE | Shinji Odanaka, Hiroyuki Umimoto, Mutsuko Wakabayashi, Hideya Esaki: SMART-P: rigorous three-dimensional process simulator on a supercomputer. IEEE Trans. on CAD of Integrated Circuits and Systems 7(6): 675-683 (1988) |
1 | Ichiro Nakao | [2] |
2 | Shinji Odanaka | [1] [2] |
3 | Hiroyuki Umimoto | [1] [2] |
4 | Mutsuko Wakabayashi | [1] |