1989 | ||
---|---|---|
1 | EE | Hiroyuki Umimoto, Shinji Odanaka, Ichiro Nakao, Hideya Esaki: Numerical modeling of nonplanar oxidation coupled with stress effects. IEEE Trans. on CAD of Integrated Circuits and Systems 8(6): 599-607 (1989) |
1 | Hideya Esaki | [1] |
2 | Shinji Odanaka | [1] |
3 | Hiroyuki Umimoto | [1] |