| |
| 1995 | ||
|---|---|---|
| 1 | Donna R. Cote, Son Van Nguyen, William J. Cote, Scott L. Pennington, Anthony K. Stamper, Dragan V. Podlesnik: Low-temperature chemical vapor deposition processes and dielectrics for microelectronic circuit manufacturing at IBM. IBM Journal of Research and Development 39(4): 437-464 (1995) | |
| 1 | Donna R. Cote | [1] |
| 2 | Son Van Nguyen | [1] |
| 3 | Scott L. Pennington | [1] |
| 4 | Dragan V. Podlesnik | [1] |
| 5 | Anthony K. Stamper | [1] |