| |
| 2007 | ||
|---|---|---|
| 1 | EE | Zai-Fa Zhou, Qing-An Huang, Wei-Hua Li, Wei Lu: A Novel 3-D Dynamic Cellular Automata Model for Photoresist-Etching Process Simulation. IEEE Trans. on CAD of Integrated Circuits and Systems 26(1): 100-114 (2007) |
| 1 | Qing-An Huang | [1] |
| 2 | Wei-Hua Li | [1] |
| 3 | Wei Lu | [1] |