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Qing-An Huang

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2007
1EEZai-Fa Zhou, Qing-An Huang, Wei-Hua Li, Wei Lu: A Novel 3-D Dynamic Cellular Automata Model for Photoresist-Etching Process Simulation. IEEE Trans. on CAD of Integrated Circuits and Systems 26(1): 100-114 (2007)

Coauthor Index

1Wei-Hua Li [1]
2Wei Lu [1]
3Zai-Fa Zhou [1]

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