2007 | ||
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1 | EE | Zai-Fa Zhou, Qing-An Huang, Wei-Hua Li, Wei Lu: A Novel 3-D Dynamic Cellular Automata Model for Photoresist-Etching Process Simulation. IEEE Trans. on CAD of Integrated Circuits and Systems 26(1): 100-114 (2007) |
1 | Wei-Hua Li | [1] |
2 | Wei Lu | [1] |
3 | Zai-Fa Zhou | [1] |