Pui L. Yee

List of publications from the DBLP Bibliography Server - FAQ

1992

1 Robert M. Booth Jr., Kurt A. Tallman, Timothy J. Wiltshire, Pui L. Yee: A statistical approach to quality control of non-normal lithographical overlay distributions. IBM Journal of Research and Development 36(5): 835-844 (1992)

1992
1		Robert M. Booth Jr., Kurt A. Tallman, Timothy J. Wiltshire, Pui L. Yee: A statistical approach to quality control of non-normal lithographical overlay distributions. IBM Journal of Research and Development 36(5): 835-844 (1992)

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