| |
| 1992 | ||
|---|---|---|
| 1 | Robert M. Booth Jr., Kurt A. Tallman, Timothy J. Wiltshire, Pui L. Yee: A statistical approach to quality control of non-normal lithographical overlay distributions. IBM Journal of Research and Development 36(5): 835-844 (1992) | |
| 1 | Kurt A. Tallman | [1] |
| 2 | Timothy J. Wiltshire | [1] |
| 3 | Pui L. Yee | [1] |