1995 | ||
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1 | EE | Alfred Kwok Kit Wong, Roberto Guerrieri, Andrew R. Neureuther: Massively parallel electromagnetic simulation for photolithographic applications. IEEE Trans. on CAD of Integrated Circuits and Systems 14(10): 1231-1240 (1995) |
1 | Roberto Guerrieri | [1] |
2 | Andrew R. Neureuther | [1] |