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2008 | ||
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2 | EE | S. Turnoy, Peter Wintermayr, Robert C. Aitken, Rudy Lauwereins, J. Tracy Weed, V. Kiefer, J. Hartmann: Panel Session - Caution Ahead: The Road to Design and Manufacturing at 32 and 22 nm. DATE 2008: 510 |
1997 | ||
1 | EE | Russell A. Budd, Derek B. Dove, John L. Staples, Ronald M. Martino, Richard A. Ferguson, J. Tracy Weed: Development and application of a new tool for lithographic mask evaluation, the stepper equivalent Aerial Image Measurement System, AIMS. IBM Journal of Research and Development 41(1&2): 119-130 (1997) |
1 | Robert C. Aitken | [2] |
2 | Russell A. Budd | [1] |
3 | Derek B. Dove | [1] |
4 | Richard A. Ferguson | [1] |
5 | J. Hartmann | [2] |
6 | V. Kiefer | [2] |
7 | Rudy Lauwereins | [2] |
8 | Ronald M. Martino | [1] |
9 | John L. Staples | [1] |
10 | S. Turnoy | [2] |
11 | Peter Wintermayr | [2] |