| |
| 1997 | ||
|---|---|---|
| 1 | EE | Russell A. Budd, Derek B. Dove, John L. Staples, Ronald M. Martino, Richard A. Ferguson, J. Tracy Weed: Development and application of a new tool for lithographic mask evaluation, the stepper equivalent Aerial Image Measurement System, AIMS. IBM Journal of Research and Development 41(1&2): 119-130 (1997) |
| 1 | Russell A. Budd | [1] |
| 2 | Derek B. Dove | [1] |
| 3 | Ronald M. Martino | [1] |
| 4 | John L. Staples | [1] |
| 5 | J. Tracy Weed | [1] |