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2008 | ||
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2 | EE | Jiachou Wang, Lining Sun, Weibin Rong, Xinxin Li: A Vertical Sidewall Surface Piezoresistor Technology Based on DRIE and Its Typical Application in Micro xy-Stages. ICIRA (2) 2008: 170-177 |
1 | EE | Tao Chen, Liguo Chen, Lining Sun, Jiachou Wang, Xinxin Li: A Sidewall Piezoresistive Force Sensor Used in a MEMS Gripper. ICIRA (2) 2008: 207-216 |
1 | Liguo Chen | [1] |
2 | Tao Chen | [1] |
3 | Xinxin Li | [1] [2] |
4 | Weibin Rong | [2] |
5 | Lining Sun | [1] [2] |